JSC "NII NPO "LUCH"" (Podolsk, part of Rosatom's scientific division) has completed the development of a technology for the production of ultra-pure tungsten hexafluoride. The work was carried out from 2023 to 2024 under a state order from the Ministry of Industry and Trade. The first production site in the country for the production of this compound is currently being designed.
The new complex will include a complete chain of equipment — from synthesis to purification and quality control. Highly purified tungsten hexafluoride is in demand in the microelectronics industry. Until now, Russia has been dependent on imports of this substance.
The creation of domestic production of ultra-pure tungsten hexafluoride is impossible without the development of a full-cycle technology for producing this compound, which meets modern requirements for labor protection and environmental safety. <...> Laboratory and pilot plants for sorption purification of tungsten hexafluoride, and a pilot plant for rectification purification have been manufactured. Also, the development and certification of methods for measuring gas and metal impurities in ultra-pure tungsten hexafluoride have now been completed.
Tungsten hexafluoride is used in the manufacture of semiconductors for the deposition of tungsten coatings by the gas phase method. Such layers are resistant to high temperatures and chemical attack, have minimal resistance, and protect boards and microcircuits.
In addition, this compound is used in gas-phase metallurgy. It is used to produce ultra-pure tungsten and create specialized coatings using hydrogen reduction and chemical transport methods.
Earlier, www1.ru reported on Rosatom's patent for the technology of producing titanium rods for medicine.
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