The Ministry of Industry and Trade will allocate 1.9 billion rubles for the development of production of materials for electron-beam and explosive lithography. As CNews found out, two tenders appeared on the public procurement portal on June 10, 2026. Applications are accepted until June 26, and research and development work must be completed by November 2029.

The first tender, code-named "SVCH Resist-1", concerns materials for electron-beam lithography and is estimated at 1 billion 17 million rubles. The second, "SVCH Resist-2", is related to materials for explosive lithography, its initial price is 889.5 million rubles. Both contracts involve a path from research to mass production.

For the first direction, it is planned to create 12 types of materials, including PMMA 950, PMMA 495, ELRP, and MMA series resists. They should replace products from Allresist, Microresist technology, ZEON, and MicroChem Corporation. For the second direction, 7 types of VL series materials will be developed – analogues of MicroChem Corporation solutions for explosive lithography.

Such materials are used in the production of electronic equipment, including products for the microwave range. The documentation indicates that Russia currently does not have its own production of materials for electron-beam lithography, and previous supplies from unfriendly countries have been discontinued.

Experts believe that the new tenders are more about forming a domestic technological base than fully meeting the needs of the industry. For lithographic materials, not only volumes are important, but also ultra-high purity, stability of characteristics, quality control, and integration into production processes. This is a continuation of the Ministry of Industry and Trade's work on import substitution of critical materials for microelectronics.