Zelenograd Nanotechnology Center (ZNTC) has started selling the first domestic lithographer with 350 nm resolution. This was announced in an interview with the annual "Living Electronics of Russia – 2026" by the company's CEO, Anatoly Kovalev.
ZNTC has been involved in the development of electronic machine building since 2021. Starting in 2027, the company plans to launch the production of an alignment and projection exposure system with 130 nm resolution. In addition, an electron-beam lithography system with 150 nm resolution and a system for controlling introduced defects on semiconductor wafer surfaces with 45 nm detection capability are currently under development.
The development of a cluster photolithography line for processing photoresist layers in submicron DUV lithography for the production of VLSI on 200 mm diameter wafers has also begun.
Lithographers are used to create microchip topology – one of the key stages in chip manufacturing. Domestic production of lithographic equipment reduces dependence on imports and strengthens the country's technological sovereignty.