Designers from the VTsMO company in Vladimir have developed a new high-vacuum turbomolecular pump. The equipment is necessary for the production of semiconductors, microelectronics, optical coatings, solar cells, satellite components, and aircraft engines.
The main feature of the new development is an unusual hybrid scheme that combines two gas pumping technologies at once – turbomolecular and molecular.
The design uses 6 working stages with blades and 4 more molecular stages with smooth discs, which provide additional gas compression.
Specialists reduced the radial gap between the rotor and stator to 1.4 mm, which allowed for a reduction in reverse gas leaks.
At the same time, the pump turned out to be noticeably more compact than its competitors: its mass decreased by 10–15%, and its dimensions by 15–20%, while maintaining a performance of at least 1000 liters of gas per minute.
Another feature is the use of hybrid ceramic bearings, designed for rotor operation at speeds up to 30 thousand revolutions per minute.