Breakthrough in optoelectronics: a unique lithograph developed at MIPT

The device operates in 3D printer mode and allows creating objects with a resolution of 350 nm

A unique domestic lithograph has been developed at the Moscow Institute of Physics and Technology (MIPT). The device allows creating 3D objects with element sizes of 150 nm and a resolution of 350 nm, the university’s press service reported. This was reported in the press service of the university.

Currently, there are no domestic competitors in this field on the Russian instrument market, and the project contributes to import substitution, since the market is mainly dominated by German instruments.
 Danila Kolymagin, chief designer of the project - head of the optical lithography design bureau

The developed lithograph is capable of creating microstructures, including 3D topologies (this is the structure and arrangement of vertices, edges, triangles, squares and other polygons that make up a 3D model) using ultrashort laser pulses in the visible range. This reduces the cost of equipment and its maintenance.

One of the advantages of the new lithograph is the ability to work in 3D printer mode. This allows you to create shapes with element sizes that are smaller than the eye can see.

The lithograph opens up new opportunities for biological, photonic and physical research.

 The device will also make a breakthrough in optoelectronics: in the technology of optical connection of elements of photonic integrated circuits using polymer optical fiber elements. This could become an analogue of soldering elements on printed circuit boards in photonics.
MIPT Press Service

The project is in the final stage of development work, and state acceptance tests are scheduled for April-May 2025. The project is expected to be completed in August 2025, and production of the lithograph will begin in 2027.

Earlier www1.ru reported that the first Russian lithograph was developed at ZNTC.

Read materials on the topic:

Roselectronica showed the technology for the production of printed circuit boards

Rostelecom is interested in a domestic lithograph and further development of the Aurora OS project

Printed circuit boards for portable electronics will be produced in Russia