The price of the Russian "Progress STP-350" lithography machine has become known. The basic version of the unit is valued at less than 392 million rubles. However, when extended service is selected, the final amount increases.
The manufacturing and delivery time for the equipment is 18 months from the date of advance payment, and the advance payment amounts to 50% of the cost of the lithography machine. When extended service and an additional five-year warranty are selected, the price rises to 561 million rubles.
The "Progress STP-350" lithography machine was created for processing silicon wafers with diameters of 150 and 200 mm. The throughput of the unit is 63 wafers per hour for the 150 mm format and 43 wafers per hour for 200 mm. The operating wavelength is 365 nm.
The development of the unit was carried out jointly with the Belarusian enterprise "Planar" as part of Ministry of Industry and Trade projects, and was completed in the spring of 2025. At present, the manufacturer is also working on the next generation of equipment designed for the 130 nm process node.
For comparison, ASML lithography machines for the 130 nm process node, processing up to 180 wafers per hour, cost about 15 million dollars. Nikon equipment is valued at 12 million dollars with throughput of up to 150 wafers per hour, while Canon solutions cost about 10 million dollars at speeds of up to 140 wafers per hour. China's SMEE offers lithography machines for 8 million dollars with throughput of about 120 wafers per hour.
Earlier, www1.ru reported that a unique lithography machine was developed at MIPT.
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